Review on Pressure Sensors: A Perspective from Mechanical to Micro-electro-mechanical systems

Abstract

Swiftly emerging research prospects in the Micro-Electro-Mechanical System (MEMS) enable to build of complex and sophisticated microstructures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators, and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is the MEMS pressure sensor. Because of their high performance, low cost, and compact size, these sensors are extensively being adopted in numerous applications viz., aerospace, automobile, and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurements as per the application requirements. Considering its vast utility in industries, this paper presents a detailed review of MEMS-based pressure sensors and their wide area of applications, their design aspects, and challenges, to provide state of an art gist to the researchers of a similar domain in one place.