Failure Strength Weibull Analysis of 4H-SiC Die through a 3-PB test

Abstract

The paper reports the mechanical properties of 4H-SiC die with different thicknesses, that have been determined through a 3-point bending (3-PB) test. In particular, it reports 1) the measurement of the failure strength of thin 4H-SiC rectangular die; 2) the Weibull analysis of the failure strength of 4H-SiC die, exploited to determine the maximal load that can be applied to the die, without any breakage; 3) the measure of 244±15 GPa for the flexural Young modulus E of SiC die, gained from the 3-PB test elaborations.