A miniature high-vacuum valve

Abstract

We present a robust design for a small on/off high-vacuum valve which can be easily manufactured and scaled for use in a variety of compact high-vacuum instruments. These instruments require a valve which can become part of their main embodiment when tubing connections would otherwise be inconvenient, such as in the application of a dewar for a cryo-electron microscopy holder. The valve establishes a vacuum seal by utilizing rubber o-rings and provides a minimal pressure rating of 10⁻⁷ Torr.