Preprint / Version 1

Porous Silicon/SiCN Pedestal Cantilever Biosensors

##article.authors##

  • ARNAB BHATTACHARYYA Central University of Jharkhand
  • Ritambhara Dash Central University of Jharkhand
  • Abhay Kumar Rajak Central University of Jharkhand
  • Ramagiri Praveen Kumar Central University of Jharkhand https://orcid.org/0000-0002-6313-7915

DOI:

https://doi.org/10.31224/2574

Keywords:

Biosensors, SiCN, Porous Silicon, nanoindentation, Finite Element Modeling

Abstract

Silicon-based cantilever biosensors used for the characterization of physical properties of cells such as their mass and stiffness have been gaining great interest and have profound implications in cell biology, tissue engineering, cancer, and disease research. The electrochemically made porous silicon (PSi) has been promising in terms of immobilizing biological molecules through its porosity and has led to improved biosensing applications. However, PSi loses its mechanical strength with porosity. The one-end cantilever sensors on the other hand are subject to non-uniform mass sensitivity. A novel SiCN and PSi-based pedestal cantilever structure have therefore been proposed which can result in improved biosensing. Nanoindentation of SiCN films showed the mechanical strength whereas Finite Element modeling was done to show mass homogeneity for the system.

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Posted

2022-09-25