Multi-mJ ultrafast laser machining with flexible multi-spot patterns

Abstract

We demonstrate how high-energy ultrafast laser sources can be used to efficiently drive well-known low-energy micro-machining applications such as surface structuring of opaque and transparent materials. The presented optical concept employs micro-lens arrays, thus standard components, as central beam splitting elements to generate multiple focal spots for parallel processing. Here, a simple and robust opto-mechanical concept enables to control the number of foci ranging from a few ten up to a few hundred spots. Throughput scaling and complete use of the industry-grade ultrafast laser platform is discussed by means of selected micro-machining examples.