Modeling and Simulation of Bending Moment in Functional Material Coated Silicon Pedestal N/MEMS Resonators

Abstract

This article presents the modeling and simulation of bending moments in silicon pedestal cantilevers coated with functional materials for N/MEMS resonator applications. Nano- and microelectromechanical systems (N/MEMS) play a pivotal role in modern sensing technologies. Pedestal cantilever sensors leverage functional materials to achieve high sensitivity and selectivity. Coatings such as Ni, Cu-doped ZnO and Zn, Ni-doped CuO enhance performance by tailoring piezoelectric and semiconducting properties. Functional materials such as (Ni, Cu)-doped ZnO, Zn, Ni-doped CuO, Porous Silicon (P-Si), Conducting polymers (CP), bioceramic (HAp), Ti-B-Si-C-N hard nanocomposite and bismaleimide (BMI) polymer coatings were simulated to be applied to the silicon-based pedestal cantilevers using MATLAB. The study examined how these materials influence the bending moment, natural frequency, and displacement under varying loading conditions considering diversified sensing functionalities. A comparative analysis of these materials for sensing different analates under different conditions has been provided.