Preprint has been published in a journal as an article
DOI of the published article https://doi.org/10.1117/12.3042674
Preprint / Version 1

Ultrafast laser micromachining using wavelengths from ~0.2μm to ~2μm

##article.authors##

  • Daniel Flamm TRUMPF Laser- und Systemtechnik GmbH
  • Marc Sailer TRUMPF Laser SE
  • Daniel Günther Grossmann TRUMPF Laser SE
  • Steffen Rübling TRUMPF Laser- und Systemtechnik SE
  • Dennis Decker TRUMPF Laser- und Systemtechnik SE
  • Christian Gaida Active Fiber Systems GmbH
  • Markus Blothe Friedrich Schiller University Jena
  • Dirk Sutter TRUMPF Laser SE
  • Stefan Nolte Friedrich Schiller University Jena

DOI:

https://doi.org/10.31224/4527

Keywords:

Optical Engineering, Ultrafast optics, UV radiation, IR radiation, Materials processing, Micromachining, Lasers

Abstract

We review micromachining strategies with optimized energy deposition from ultrafast lasers operating with wavelengths from 1980nm down to 257nm. By discussing multifarious machining concepts, such as, e.g., in-volume silicon processing (NIR), drilling of fine-metal masks (green), or cutting of polymer foils (DUV), we show how processing benefits from adapted photon energies or tighter foci. In all cases, an optimized processing solution is achieved precisely when light source, beam shaping and focusing concept are tailored to each other and to the respective light-material interaction.

Downloads

Download data is not yet available.

Downloads

Posted

2025-04-17

License

Copyright (c) 2025 Daniel Flamm, Marc Sailer, Daniel Günther Grossmann, Steffen Rübling, Dennis Decker, Christian Gaida, Markus Blothe, Dirk Sutter, Stefan Nolte

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.