Multi-process integration of nanoscale polymer and metal 3D printing for multi-material micro-optics

Abstract

The ability to integrate different materials on the same substrate can significantly expand the functionality of printed optical microsystems. However, integration is challenging due to the apparent incompatibility between polymer and metal nanoscale 3D printing techniques. Here, we demonstrate the printing of polymer and metal micro-optics on a copper-coated silicon wafer using two different nanoscale 3D printers based on photopolymerization and electrochemical deposition. We identify the challenges in integrating these techniques and present an optimized fabrication scheme that enables cross-platform hybrid printing. Our work establishes a practical way for hybrid polymer-metal additive manufacturing using commercially available high-resolution nanoscale 3D printers.