Technical Cleanliness Analysis by Nanomanipulators- the Direct Method

Abstract

Technical Cleanliness (TC) has been continually growing into ever-present discipline of industrial manufacturing. Following the trend of downsizing products, any contamination present in or on the finished product represents a danger that can severely affect its proper, intended functionality. Therefore, analytical methods capable to characterise particulate contamination are essential part of VDA 19 and ISO 16 232 standards governing TC agenda.

Nanomanipulation is widely used for electric characterisation of circuits in the semiconductor manufacturing(quality-control). In this experiment design, the utilisation of nanomanipulators for electric characterisation of particulate contamination is shortly described.