Simple Method to Determine Linearity Deviations of Topography Measuring Instruments with a Large Range Axial Scanning System

Abstract

The use of areal characterization of surface texture with high accuracy in a quality control process requires reliability. Therefore, regular inspection of the measurement systems is needed. Important metrological features of a measure- ment system in dimensional metrology are the amplification factor and linearity. This paper presents a simple method for characterizing the axial scanning system of areal topography measuring instruments with little expense and effort, well suited for industrial routine calibration in the field. The method is based on employing a single material measure with a range of step heights. It is shown that the amplification factor and linearity deviations can be determined and adjusted for large axial measurement ranges.